Art
J-GLOBAL ID:200902131032493474
Reference number:01A0238133
Heat dissipation in thin-film vacuum sensor.
薄膜真空センサにおける熱散逸
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Author (1):
Material:
Volume:
19
Issue:
1
Page:
325-328
Publication year:
Jan. 2001
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
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JST classification (2):
JST classification
Category name(code) classified by JST.
Vacuum production and techniques
, Thermoelectric devices
Terms in the title (3):
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