UVIII-positive chemically amplified resist optimization.

ROCQUE J M; BROOKS C J; HENRY R W; BENOIT D E; MANGAT P J S

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J-GLOBAL ID：200902131033818423 Reference number：98A0789605

UVIII-positive chemically amplified resist optimization.

UVIII-陽性化学的増幅型レジストの最適化

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Author (5)： , , , ,
Material：
Volume： 3331 Page： 487-495 Publication year： 1998
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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