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ArticleJ-GLOBAL ID:200902131041671520整理番号:98A0265505

Influence of the microstructure of Pt/Si substrates on textured growth of barium titanate thin films prepared by pulsed laser deposition.

パルスレーザ蒸着により作製したチタン酸バリウム薄膜の組織成長へのPt/Si基板の微細構造の影響

著者:HWANG C S(National Inst. Standards and Technol., Maryland)、VAUDIN M D(National Inst. Standards and Technol., Maryland)、SCHENCK P K(National Inst. Standards and Technol., Maryland)
資料名:J Mater Res 巻:13 号:2 ページ:368-375
発行年:1998年02月
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