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ArticleJ-GLOBAL ID:200902131041764090整理番号:96A0879009

ストレスリーク電流における非弾性トンネリングの実験的検証

Experimental Evidence for inelastic tunneling in stress-induced leakage current in SiO2.

著者:高木信一(東芝 ULSI研)、安田直樹(東芝 ULSI研)、鳥海明(東芝 ULSI研)
資料名:応用物理学会学術講演会講演予稿集 巻:57th 号:2 ページ:566
発行年:1996年09月
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