Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In<sub>2</sub>O<sub>3</sub> on glass substrate.

VAIVARS G; KLEPERIS J; ZUBKANS J; VITINS G; LIBERTS G; LUSIS A

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J-GLOBAL ID：200902131044586885 Reference number：96A0846770

Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In₂O₃ on glass substrate.

ガラス基板上のIn₂O₃でのレーザ切断ナローギャップのガス感度特性に対する薄膜被覆の影響

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Volume： 33 Issue： 1/3 Page： 173-177 Publication year： Jul. 1996
JST Material Number： T0967A ISSN： 0925-4005 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In2O3 on glass substrate.

Influence of thin film coatings on the gas sensitivity properties of narrow laser cut gap in In₂O₃ on glass substrate.