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ArticleJ-GLOBAL ID:200902131050966444整理番号:97A1006205

Problems of sacrifical etching in the presence of aluminium interconnect.

アルミニウム接合が存在する場合の犠牲エッチングの問題点

著者:GOOSEN J F L(Delft Univ. Technol., Delft, NLD)、VAN DRIEEENHUIZEN B P(Delft Univ. Technol., Delft, NLD)、FRENCH P J(Delft Univ. Technol., Delft, NLD)・・・
資料名:Sens Actuators A 巻:A62 号:1/3 ページ:692-697
発行年:1997年07月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.