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ArticleJ-GLOBAL ID:200902131052132745整理番号:94A0179983

Cu配線の耐熱性

Thermal stability of the Cu interconnect.

著者:五十嵐泰史(沖電気工業)、山野辺智美(沖電気工業)、伊東敏雄(沖電気工業)
資料名:応用物理学会学術講演会講演予稿集 巻:54th 号:2 ページ:768
発行年:1993年09月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.