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J-GLOBAL ID:200902131052193655   Reference number:98A0705584

Optimization of a Membrane Welding Process.

薄膜への微小溶接の最適化
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Volume:Issue:Page: 65-69  Publication year: Aug. 1998 
JST Material Number: L3004A  ISSN: 2189-633X  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Statistical quality control  ,  Measuring instruments in general  ,  Manufacturing technology of solid-state devices 
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