Art
J-GLOBAL ID：200902165018037387
Reference number：95A0021222
1995’s latest liquid crystal process technology.Resist peeling, and cleaning technology.Batch type processing unit.WF-310C.DAINIPPON SCREEN MFG. Co., Ltd.
’95最新液晶プロセス技術 レジスト剥離・洗浄技術 バッチ式処理装置 WF-310C 大日本スクリーン製造
Material：
Volume：
13
Issue：
13
Page：
147
Publication year：
Oct. 1994
JST Material Number：
Y0509A
ISSN：
0286-5025
Document type：
Article
Article type：
解説
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Display equipment
, Manufacturing technology of solid-state devices
Terms in the title (5)：
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