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ArticleJ-GLOBAL ID:200902165027622411整理番号:97A0981498

レーザー蒸着法によるダイヤモンド状炭素膜の作製と評価

Manufacture and evaluation of a diamond-like carbon film by laser vapor deposition.

著者:山本和弘(物質工学工技研)、小海文夫(産業創造研)、古賀義紀(物質工学工技研)・・・
資料名:日本金属学会講演概要 巻:121st ページ:288
発行年:1997年09月
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About J-GLOBAL

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