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J-GLOBAL ID:200902165033288256   Reference number:95A0121002

Photoresists based on a Novel Photorearrangement of o-Nitrobenzylic Polymers.

o-ニトロベンジル系高分子の新しい光転位に基づくフォトレジスト
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Volume:Issue: 12  Page: 1769-1773  Publication year: Dec. 1994 
JST Material Number: W0204A  ISSN: 0959-9428  CODEN: JMACEP  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Other reactions of polymer  ,  Polycondensation 
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