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ArticleJ-GLOBAL ID:200902165040085514整理番号:01A0387773

Chemical vapor deposition of an aluminium nitride-diamond composite in a triple torch plasma reactor.

三重トーチプラズマ炉における窒化アルミニウム‐ダイヤモンド複合材料の化学蒸着

著者:ASMANN M(Univ. Minnesota, Minnesota)、COOK R F(Univ. Minnesota, Minnesota)、HEBERLEIN J V(Univ. Minnesota, Minnesota)・・・
資料名:J Mater Res 巻:16 号:2 ページ:469-477
発行年:2001年02月
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About J-GLOBAL

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