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ArticleJ-GLOBAL ID:200902165042314308整理番号:96A0636366

Visible photoluminescence from silicon nanocrystals formed in silicon dioxide by ion implantation and thermal processing.

イオン注入と熱処理により二酸化けい素中に形成したシリコンナノ結晶からの可視‐光ルミネセンス

著者:SHIMIZU‐IWAYAMA T(Aichi Univ. Education, Aichi, JPN)、TERAO Y(Aichi Univ. Education, Aichi, JPN)、KAMIYA A(Aichi Univ. Education, Aichi, JPN)・・・
資料名:Thin Solid Films 巻:276 号:1/2 ページ:104-107
発行年:1996年04月15日
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