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ArticleJ-GLOBAL ID:200902165066344100整理番号:94A0846911

Layered semiconductor photoreflectance diagnostics.

層状半導体光反射法診断

著者:BOLTAR K O(Moscow State Univ. Technology “Stankin”, Moscow, SUN)、FEDIRKO V A(Moscow State Univ. Technology “Stankin”, Moscow, SUN)
資料名:Diagnostic Techniques for Semiconductor Materials Processing ページ:175-180
発行年:1994年
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About J-GLOBAL

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