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ArticleJ-GLOBAL ID:200902165074506829整理番号:00A0314061

Influence of argon pressure on the depth resolution during GDOES depth profiling analysis of thin films.

薄膜のGDOES深さプロフィル分析における深さ分解能に及ぼすアルゴン圧の効果

著者:SHIMIZU K(Keio Univ., Yokohama, JPN)、HABAZAKI H(Tohoku Univ., Sendai, JPN)、SKELDON P(UMIST, Manchester, GBR)・・・
資料名:Surf Interface Anal 巻:29 号:2 ページ:155-159
発行年:2000年02月
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