J-GLOBAL ID:200902165074835482整理番号:96A0176614
High Performance 0.3.MU.m CMOS using I-Line Lithography and BARC.
I‐線リソグラフィーとBARCを用いた高性能0.3μmCMOS
資料名:Dig Tech Pap Symp VLSI Technol 巻:1995 ページ:75-76
発行年:1995年
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J-GLOBAL ID:200902165074835482整理番号:96A0176614
I‐線リソグラフィーとBARCを用いた高性能0.3μmCMOS
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