Art
J-GLOBAL ID：200902165078322269
Reference number：97A0755821
Challenges for optical lithography in production at the sub-half-micron scale.
0.5μm以下の生産における光リソグラフィーへの挑戦
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Author (1)：
Material：
Volume：
14
Issue：
1
Page：
2-6
Publication year：
1997
JST Material Number：
D0015B
ISSN：
1367-0476
Document type：
Article
Article type：
解説
Country of issue：
United Kingdom (GBR)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
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