Art
J-GLOBAL ID:200902165095158855   Reference number:00A1021316

Factors affecting pitch bias in lithography simulation.

Author (5):
Material:
Volume: 4000  Issue: Pt.1  Page: 744-758  Publication year: 2000 
JST Material Number: D0943A  ISSN: 0277-786X  CODEN: PSISDG  Document type: Proceedings
Country of issue: United States (USA)  Language: ENGLISH (EN)

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