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ArticleJ-GLOBAL ID:200902165099680610整理番号:99A0773960

On the grain size and coalescence stress resulting from nucleation and growth processes during formation of polycrystalline thin films.

多結晶薄膜形成中の核形成と成長過程から生じる結晶粒サイズと合体応力について

著者:THOMPSON C V(Max‐Planck‐Inst. Metallforsch., Stuttgart, DEU)
資料名:J Mater Res 巻:14 号:7 ページ:3164-3168
発行年:1999年07月
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