Art
J-GLOBAL ID:200902165103081387   Reference number:01A0565036

Argon inclusion in sputtered films and the effect of the gas on molybdenum field emitter arrays.

スパッタ薄膜中のアルゴン包有物とモリブデン電界放出アレイに対するガスの効果
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Material:
Volume: 78  Issue: 15  Page: 2151-2153  Publication year: Apr. 09, 2001 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Thermoionic emission and field emission  ,  Display equipment 

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