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ArticleJ-GLOBAL ID:200902165104659277整理番号:02A0892201

Analysis and experiment of HBAR frequency spectra and applications to characterize the piezoelectric thin film and to HBAR design.

HBAR周波数スペクトルの解析と実験及び圧電薄膜特性評価とHBAR設計への応用

著者:PAO S‐Y(TXC Corp., Taoyuan County, TWN)、CHAO M‐C(TXC Corp., Taoyuan County, TWN)、WANG Z(TXC Corp., Taoyuan County, TWN)・・・
資料名:Proc IEEE Int Freq Control Symp 巻:2002 ページ:27-35
発行年:2002年
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