Art
J-GLOBAL ID:200902165106422916
Reference number:00A0772103
Feedback Control of Morphology During III-V Semiconductor Growth by Molecular Beam Epitaxy.
分子ビームエピタクシーによるIII-V族半導体成長時のモルフォロジーのフィードバック制御
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Author (5):
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Material:
Volume:
38th
Issue:
Vol.4
Page:
4204-4209
Publication year:
1999
JST Material Number:
A0744B
ISSN:
0191-2216
Document type:
Proceedings
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2):
JST classification
Category name(code) classified by JST.
Materials of solid-state devices
, Process controls
Terms in the title (5):
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