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ArticleJ-GLOBAL ID:200902165111043761整理番号:96A0844734

Determination of N and O Atom Density in Ar-N2-H2 and Ar-O2-H2 Flowing Microwave Post Discharges.

Ar‐N2‐H2及びAr‐O2‐H2の流れているマイクロ波ポスト放電中のN及びO原子密度の決定

著者:CZERWIEC T(Ecole des Mines de Nancy, Nancy, FRA)、GAVILLET J(Ecole des Mines de Nancy, Nancy, FRA)、BELMONTE T(Ecole des Mines de Nancy, Nancy, FRA)・・・
資料名:J Phys 3 巻:6 号:9 ページ:1205-1212
発行年:1996年09月
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