Art
J-GLOBAL ID：200902165115995899
Reference number：95A0605179
Progression of Multilevel Metallization Beyond 0.35 micron Technology.
0.35ミクロン技術を超越するマルチレベルメタライゼーションの進歩
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Author (1)：
Material：
Volume：
1994
Page：
97-100
Publication year：
1994
JST Material Number：
C0829B
ISSN：
0163-1918
Document type：
Proceedings
Article type：
解説
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices
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