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ArticleJ-GLOBAL ID:200902165119567239整理番号:97A0053037

DSMC法によるナノメータ浮上ステップ形ヘッドの浮上特性解析

DSMC Analyses of Step-type Slider Gas Bearings with Nano-meter Spacings.

著者:福井茂寿(鳥取大)、金子礼三(和歌山大)
資料名:日本機械学会情報・知能・精密機器部門講演会講演論文集 巻:1996 ページ:17-18
発行年:1996年08月
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