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J-GLOBAL ID:200902165119567239   Reference number:97A0053037

DSMC Analyses of Step-type Slider Gas Bearings with Nano-meter Spacings.

DSMC法によるナノメータ浮上ステップ形ヘッドの浮上特性解析
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Volume: 1996  Page: 17-18  Publication year: Aug. 1996 
JST Material Number: L1518A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Measurement,testing and reliability of solid-state devices 
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