About J-GLOBAL

日本語

Font size
  • A
  • A

Articleの詳細情報

ArticleJ-GLOBAL ID:200902165125516387整理番号:94A0283272

特集 数世代対応形半導体製造装置の動向 ヘリコン波プラズマエッチャ「APEX7000/PINNACLE8000」の特徴

Special issue : Trend of the several generations corresponding type semiconductor manufacturing equipment.Features of helicon wave plasma etcher "APEX7000/PINNACLE8000".

著者:河村勝文(キヤノン販売)、山本仁(キヤノン販売)
資料名:電子材料 巻:33 号:3 ページ:76-81
発行年:1994年03月
  • J-GLOBAL home
  • Bookmark J-GLOBAL

J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.