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ArticleJ-GLOBAL ID:200902165127350435整理番号:95A0832643

Rotary vane and roots pumps backed by diaphragm pumps-Progress in corrosive applications and clean vacuum requirements.

ダイアフラムポンプで補助された回転翼形及びルーツポンプ 腐食性応用及び清浄真空要求における進歩

著者:ECKLE F J(Vacuubrand GmbH+Co., Wertheim, DEU)、BICKERT P(Vacuubrand GmbH+Co., Wertheim, DEU)、LACHENMANN R(Vacuubrand GmbH+Co., Wertheim, DEU)
資料名:Vacuum 巻:46 号:8/10 ページ:793-796
発行年:1995年08月
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