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ArticleJ-GLOBAL ID:200902165129318830整理番号:94A0518296

マイクロ波プラズマCVD法を使ったダイヤモンド薄膜の成長について

Growth of diamond film using microwave plasma CVD technique.

著者:村上理一(徳島大 工)、稲葉達一(徳島大 工)、田川憲一(徳島大 大学院)・・・
資料名:日本材料学会学術講演会講演論文集 巻:43rd ページ:127-128
発行年:1994年
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