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ArticleJ-GLOBAL ID:200902165132657395整理番号:97A0709916

反応性スパッタリングによるAl‐Sn窒化膜の潤滑特性

Lubrication characteristics of a Al-Sn nitride film by reactive sputtering.

著者:高谷松文(千葉工大)、坂本幸弘(千葉工大)、大川広衛(エヌデーシー)・・・
資料名:日本トライボロジー学会トライボロジー会議予稿集 巻:1997-5 ページ:241-243
発行年:1997年04月
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