Art
J-GLOBAL ID：200902165134525810   Reference number：96A0720606

Integrated Stack Etching Using a Helicon Plasma Source.

ヘリコンプラズマ源を使用した統合化積層エッチング
Author (2)：
GIBSON G W JR

About GIBSON G W JR

(Plasma & Materials Technol., Calif.)

About Plasma & Materials Technol., Calif.

, 
HEMKER D J

About HEMKER D J

(Plasma & Materials Technol., Calif.)

About Plasma & Materials Technol., Calif.


Material：
Semiconductor International  (Semicond Int)

About Semiconductor International


Volume： 19  Issue： 8  Page： 193-194,196,198,200  Publication year： Jul. 1996 
JST Material Number： D0457B  ISSN： 0163-3767  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
helicon

About helicon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
cluster tool

About cluster tool


   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=96A0720606&from=J-GLOBAL&jstjournalNo=D0457B") }}
JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
ヘリコンプラズマ

About ヘリコンプラズマ

, 
統合化

About 統合化

, 
エッチング

About エッチング


Return to Previous Page

TOP

BOTTOM