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ArticleJ-GLOBAL ID:200902165146240870整理番号:96A0361796

In situ characterization of the transient behavior of particles in low pressure plasmas.

低圧プラズマ中での粒子の過渡的挙動のその場特性評価

著者:SCHMIDT U I(Univ. California at Berkeley, California)、GRAVES D B(Univ. California at Berkeley, California)
資料名:J Vac Sci Technol A 巻:14 号:2 ページ:595-602
発行年:1996年03月
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About J-GLOBAL

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