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ArticleJ-GLOBAL ID:200902165150358010整理番号:98A0552043

Laser-induced reversible change of electrical resistivity of CoSi2 thin-film sensors.

CoSi2薄膜センサの電気抵抗のレーザ照射による可逆変化

著者:KNITE M(Riga Technical Univ., Riga, LVA)、MEDVID’ A(Riga Technical Univ., Riga, LVA)、GRIGONIS A(Kaunas Univ. Technol., Kaunas, LVA)
資料名:Sens Actuators A 巻:A67 号:1/3 ページ:166-169
発行年:1998年05月15日
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