Art
J-GLOBAL ID：200902165150358010   Reference number：98A0552043

Laser-induced reversible change of electrical resistivity of CoSi2 thin-film sensors.

CoSi2薄膜センサの電気抵抗のレーザ照射による可逆変化
Author (3)：
KNITE M

About KNITE M

(Riga Technical Univ., Riga, LVA)

About Riga Technical Univ., Riga, LVA

, 
MEDVID' A

About MEDVID' A

(Riga Technical Univ., Riga, LVA)

About Riga Technical Univ., Riga, LVA

, 
GRIGONIS A

About GRIGONIS A

(Kaunas Univ. Technol., Kaunas, LVA)

About Kaunas Univ. Technol., Kaunas, LVA


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： A67  Issue： 1/3  Page： 166-169  Publication year： May. 15, 1998 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*evaporated film

About evaporated film

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

,  Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
薄膜センサ

About 薄膜センサ

, 
電気抵抗

About 電気抵抗

, 
レーザ照射

About レーザ照射

, 
可逆変化

About 可逆変化


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