Art
J-GLOBAL ID：200902165152005807
Reference number：94A0463987
Dynamics and control of the Czocharalski process IV. Control structure design for interface shape control and performance evaluation.
Czochralski過程の動力学と制御 IV 界面形状制御と性能評価のための制御構造設計
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Author (1)：
Material：
Volume：
139
Issue：
3/4
Page：
286-301
Publication year：
May. 1994
JST Material Number：
B0942A
ISSN：
0022-0248
Document type：
Article
Article type：
原著論文
Country of issue：
Netherlands (NLD)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Crystal growth in general
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