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ArticleJ-GLOBAL ID:200902165152005807整理番号:94A0463987

Dynamics and control of the Czocharalski process IV. Control structure design for interface shape control and performance evaluation.

Czochralski過程の動力学と制御 IV 界面形状制御と性能評価のための制御構造設計

著者:GEVELBER M A(Boston Univ., Massachusetts, USA)
資料名:J Cryst Growth 巻:139 号:3/4 ページ:286-301
発行年:1994年05月
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