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ArticleJ-GLOBAL ID:200902165154328336整理番号:98A0083342

Quantitative Secondary Ion Mass Spectrometry Analysis of the Native Oxide on Silicon Wafers.

シリコンウエハ上の自然酸化物の定量二次イオン質量分析

著者:YAMAZAKI H(Toshiba Corp., Yokohama, JPN)、TAKAHASHI M(Toshiba Corp., Kawasaki, JPN)
資料名:Surf Interface Anal 巻:25 号:12 ページ:937-941
発行年:1997年11月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.