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ArticleJ-GLOBAL ID:200902165159466958整理番号:97A0431728

オージェ分析と電顕によるNi/Ti金属多層膜の構造評価

Microstructures of Ni/Ti Multilayer Films using AES and TEM Techniques.

著者:藤本靖孝(名古屋工大)
資料名:名古屋工業大学紀要 巻:48(1996) ページ:157-163
発行年:1997年03月
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