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ArticleJ-GLOBAL ID:200902165167266828整理番号:94A0731164

Thermal stability of sputtered Mo/X and W/X(X=BN:O, B4C:O, Si, and C) multilayer soft-x-ray mirrors.

スパッタ法で作成したMo/XおよびW/X(X=BN:O,B4C:O,Si,C)の多層膜軟X線鏡の熱安定性

著者:OKADA H(Tohoku Univ., Sendai, JPN)、MAYAMA K(Tohoku Univ., Sendai, JPN)、GOTO Y(Tohoku Univ., Sendai, JPN)・・・
資料名:Appl Opt 巻:33 号:19 ページ:4219-4224
発行年:1994年07月01日
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