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J-GLOBAL ID:200902165167266828   Reference number:94A0731164

Thermal stability of sputtered Mo/X and W/X(X=BN:O, B4C:O, Si, and C) multilayer soft-x-ray mirrors.

スパッタ法で作成したMo/XおよびW/X(X=BN:O,B4C:O,Si,C)の多層膜軟X線鏡の熱安定性
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Volume: 33  Issue: 19  Page: 4219-4224  Publication year: Jul. 01, 1994 
JST Material Number: B0026B  ISSN: 1559-128X  CODEN: APOPAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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X-ray instruments and techniques  ,  Metallic thin films 
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