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ArticleJ-GLOBAL ID:200902165183408233整理番号:96A0038352

Effects of grain size and preferred orientation on the electromigration lifetime of Al-based layered metallization.

Alベースの多層メタライゼーションのエレクトロマイグレーション寿命に及ぼす結晶粒サイズと優先配向の影響

著者:KONDO S(Hitachi, Ltd., Saitama, JPN)、DEGUCHI O(Toho Univ., Chiba, JPN)、HINODE K(Hitachi, Ltd., Tokyo, JPN)
資料名:J Appl Phys 巻:78 号:11 ページ:6534-6538
発行年:1995年12月01日
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