Art
J-GLOBAL ID:200902165189705469   Reference number:95A1009035

Characteristics of dual-gate CMOS device using in-situ boron doped polysilicon gate. (II).

In-situ Boron Doped-Siで製作したDual Gate CMOS特性の評価 (II)
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Volume: 56th  Issue:Page: 631  Publication year: Aug. 1995 
JST Material Number: Y0055A  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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