Art
J-GLOBAL ID：200902165190938868   Reference number：95A1049027

Semiconductor device and its production technique.

半導体装置およびその製造方法
Author (1)：
TAKAHASHI KENJI

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(東芝)

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Material：
東芝技術公開集

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Volume： 13  Issue： 85  Page： 141-146  Publication year： Nov. 1995 
JST Material Number： L0795A  ISSN： 0288-2701  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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IC package

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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,  Connecting parts 
(NA05050Z)

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製造方法

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