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ArticleJ-GLOBAL ID:200902165193462325整理番号:01A0628638

GaAs MOSFET's Fabrication with a Selective Liquid Phase Oxidized Gate.

選択液相酸化ゲートを有するGaAs MOSFETの作製

著者:WU J‐Y(National Cheng‐Kung Univ., Tainan, TWN)、WANG H‐H(National Cheng‐Kung Univ., Tainan, TWN)、WANG Y‐H(National Cheng‐Kung Univ., Tainan, TWN)・・・
資料名:IEEE Trans Electron Devices 巻:48 号:4 ページ:634-637
発行年:2001年04月
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