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J-GLOBAL ID:200902165198402991   Reference number:94A0926688

Special issue : Latest development results of thin film magnetic head.Sputtering instruments for the magnetic head.

特集 薄膜磁気ヘッドの最新開発成果 磁気ヘッド用スパッタリング装置
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Volume: 33  Issue: 11  Page: 55-60  Publication year: Nov. 1994 
JST Material Number: F0040A  ISSN: 0387-0774  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electronic recording,magnetic recording,optical recording 
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