Art
J-GLOBAL ID:200902165198554147
Reference number:97A0161694
Process Technology for Devices: 300mm Transport that Bucks the Trend. Increasing Transport Costs Hinder Automation.
Process Technology for Devices トレンドが踏めない300mm搬送 自動化を阻む搬送コストの増大標準化の進進が道を開く
Author (1):
Material:
Volume:
16
Issue:
1
Page:
108-111
Publication year:
Jan. 1997
JST Material Number:
Y0509A
ISSN:
0286-5025
Document type:
Article
Article type:
解説
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Materials of solid-state devices
Terms in the title (4):
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