Art
J-GLOBAL ID：200902165200213115   Reference number：02A0961880

超LSI製造・試験装置ガイドブック 2003年版 1. 総論 High-k要素プロセスの現状と課題

Author (1)：
KITAJIMA HIROSHI

About KITAJIMA HIROSHI

(半導体先端テクノロジーズ 第1研究部)

About 半導体先端テクノロジーズ 第1研究部


Material：
電子材料  (Electronic Parts and Materials)

About 電子材料


Issue： 11月号別冊  Page： 7-11  Publication year： Nov. 27, 2002 
JST Material Number： F0040A  ISSN： 0387-0774  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*VLSI

About VLSI

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
conduction band

About conduction band

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor integrated circuit 
(NC03162T)

About Semiconductor integrated circuit

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
LSI

About LSI

, 
試験装置

About 試験装置

, 
ガイドブック

About ガイドブック

, 
要素

About 要素

, 
プロセス

About プロセス

, 
現状

About 現状


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