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ArticleJ-GLOBAL ID:200902165209043352整理番号:97A0936080

マイクロマシニング技術を用いた超小型熱分析装置の製作とその評価

Production of miniature thermal analysis equipment using micromachining technology and its evaluation.

著者:早坂淳一(東北学院大 工)、沢井千香子(東北学院大 工)、木村光照(東北学院大 工)
資料名:電気関係学会東北支部連合大会講演論文集 巻:1997 ページ:216
発行年:1997年08月
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