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ArticleJ-GLOBAL ID:200902165214056101整理番号:95A0033179

アルミニウム合金薄膜における表面微小隆起発生メカニズムの解析

Study of Hillock Formation Mechanism in Passivated Aluminum-alloy Thin Films.

著者:中島隆(日立 機械研)、三浦英生(日立 機械研)、西村朝雄(日立 機械研)
資料名:日本機械学会計算力学講演会講演論文集 巻:7th ページ:302-303
発行年:1994年11月
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