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ArticleJ-GLOBAL ID:200902165218093753整理番号:00A0339561

Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation.

直接電子ビーム蒸発によって堆積したふっ化マグネシウム薄膜の評価

著者:DUMAS L(LETI/CEA‐G.‐DOPT, Grenoble, FRA)、QUESNEL E(LETI/CEA‐G.‐DOPT, Grenoble, FRA)、ROBIC J‐Y(LETI/CEA‐G.‐DMEL, Grenoble, FRA)・・・
資料名:J Vac Sci Technol A 巻:18 号:2 ページ:465-469
発行年:2000年03月
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