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ArticleJ-GLOBAL ID:200902212372669488整理番号:09A0033511

Viscoelastic mechanical behavior of soft microcantilever-based force sensors

軟らかい微小片持梁に基づく力センサの粘弾性力学挙動

著者:LIN I-kuan(Dep. of Mechanical Engineering, Boston Univ., 110 Cummington Street, Boston, Massachusetts 02215, USA)、LIAO Yen-ming(Dep. of Mechanical Engineering, National Cheng Kung Univ., Tainan 701, Taiwan)、LIU Yan(Dep. of Mechanical Engineering, Boston Univ., 110 Cummington Street, Boston, Massachusetts 02215, USA)・・・
資料名:Appl Phys Lett 巻:93 号:25 ページ:251907
発行年:2008年12月22日
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