Electron dynamics of low-pressure deposition plasma

YASUDA Hirotsugu; LEDERNEZ Loic; OLCAYTUG Fethi; URBAN Gerald

Art

J-GLOBAL ID：200902212381414239 Reference number：08A1004095

Electron dynamics of low-pressure deposition plasma

低圧析出プラズマの電子動力学

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Material：
Volume： 80 Issue： 9 Page： 1883-1892 Publication year： Sep. 2008
JST Material Number： H0385A ISSN： 0033-4545 CODEN： PACHAS Document type： Article
Article type：解説 Country of issue： Germany, Federal Republic of (DEU) Language： ENGLISH (EN)

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Gas discharges , Polymerization in general

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