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J-GLOBAL ID:200902212393850042   Reference number:04A0919209

Fabrication of Piezoelectric Ceramic Micro-Actuator and Its Reliability for Hard Disk Drives

ハードディスクドライブ応用のための圧電セラミックマイクロアクチュエータの製造と信頼性
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Volume: 51  Issue: 11  Page: 1470-1476  Publication year: Nov. 2004 
JST Material Number: H0369A  ISSN: 0885-3010  CODEN: ITUCER  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Design,manufacturing,and components of robots  ,  Electronic recording,magnetic recording,optical recording 
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