Art
J-GLOBAL ID:200902212401213960   Reference number:07A1157302

Modeling of planar spiral inductively-coupled microwave plasma source

平板螺旋の誘導結合マイクロ波プラズマ源のモデル化
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Material:
Volume: 22  Issue:Page: 400-404  Publication year: 2007 
JST Material Number: C2508A  ISSN: 1005-0388  CODEN: DKEXFT  Document type: Article
Article type: 原著論文  Country of issue: China (CHN)  Language: CHINESE (ZH)
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Plasma devices  ,  Antennas 
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