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ArticleJ-GLOBAL ID:200902212401213960整理番号:07A1157302

平板螺旋の誘導結合マイクロ波プラズマ源のモデル化

Modeling of planar spiral inductively-coupled microwave plasma source

著者:LIAO Bin(Dep. of Electronic Engineering ,East China Normal Univ., Shanghai)、CAO Huanli(Dep. of Electronic Engineering ,East China Normal Univ., Shanghai)、ZHU Shouzheng(Dep. of Electronic Engineering ,East China Normal Univ., Shanghai)
資料名:Dianbo Kexue Xuebao 巻:22 号:3 ページ:400-404
発行年:2007年
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